%PDF-1.4
%
1 0 obj
<>
endobj
2 0 obj
<>
endobj
3 0 obj
<>stream
IEEE
IEEE Transactions on Antennas and Propagation;2020;68;11;10.1109/TAP.2020.2992898
Millimeter-wave
modified bulk silicon micromachining technology
planar antenna array
Millimeter-Wave Planar Antenna Array Based on Modified Bulk Silicon Micromachining Technology
endstream
endobj
4 0 obj
<>stream
x+ |
endstream
endobj
5 0 obj
<>stream
x0D+fBTv>XDk@m[lL=hizr)⮔!E':-pN>|F+
aK'!rs
5F켄w}縱n;C:d*S*Erg;l˲ıoرN x}ױSiO}<+
endstream
endobj
6 0 obj
<>stream
x+ |
endstream
endobj
7 0 obj
<>stream
x0D+fBTv>XDk@m[l<2A+Mӣȡ/R扚F!ܬJG